Gallium arsenide material and process evaluation by means of pul

Details Gallium arsenide material and process evaluation by means of pul Gallium arsenide material and process evaluation by means of pul

1985-11-21

1986-08-05

Terapane, John F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324158R, G05B 2300

Patent

active

H00001112

ABSTRACT:
A method is disclosed for determining characteristics of semi-insulating lium arsenide that can be used to evaluate the suitability of the material for semiconductor processing. An n-channel test device formed on a substrate of semi-insulating gallium arsenide is illuminated with pulses of light. The decay in the photoconductance that occurs due to the illumination is measured in order to enable characterization of the shallow acceptor impurities which compensate the deep donors in the semi-insulating gallium arsenide.

REFERENCES:
patent: 4180784 (1979-12-01), Nelson et al.
patent: 4205265 (1980-05-01), Staebler
patent: 4456879 (1984-06-01), Kleinknecht
patent: 4473796 (1984-09-01), Nankivil
patent: 4477775 (1984-10-01), Fazekas
patent: 4482863 (1984-11-01), Auston et al.

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