Coherent light generators – Particular resonant cavity – Distributed feedback
Patent
1985-01-30
1988-01-26
Davie, James W.
Coherent light generators
Particular resonant cavity
Distributed feedback
372 46, 372 50, 372108, H07S 319
Patent
active
047220929
ABSTRACT:
A distributed feedback (DFB) type laser and a method and apparatus for forming same wherein a quaternary semiconductor active lasing strip of material is buried between a substrate of binary compound of one type conductivity material and a mesa binary compound body of opposite type conductivity and a periodic grating structure is etched into the plateau of the mesa. In one embodiment, ohmic contacts are provided on either side of the grating structure and the mesa is undercut adjacent the active strip to partly isolate the ohmic contacts from the homojunction formed when the active strip is buried, preferably using a mass-transport process. In another embodiment, the ohmic contacts are formed on the top of a deeply etched grating structure. A buried layer double heterostructure (DH) laser is also described with DFB grating formed on the side walls
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Flanders Dale C.
Liau Zong-Long
Walpole James N.
Davie James W.
Massachusetts Institute of Technology
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