Fusion attachment of rigid pellicles and/or frames

Details Fusion attachment of rigid pellicles and/or frames Fusion attachment of rigid pellicles and/or frames

2005-01-11

2005-01-11

Kim, Peter B. (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for original

C428S014000, C430S005000

Reexamination Certificate

active

06842227

ABSTRACT:
A rigid pellicle, used to protect a patterned reticle from contamination in a lithographic process in the manufacture of integrated circuits, is attached to a mounting frame by fusing the pellicle and frame together. In one embodiment, an infrared laser beam is used to produce the fusion along the seam between the pellicle and the frame. The frame may also be attached to the reticle through a similar fusion process. In one embodiment, the pellicle, frame, and reticle are all comprised of fused silica.

REFERENCES:
patent: 5723860 (1998-03-01), Hamada et al.
patent: 20020004126 (2002-01-01), Honda et al.
patent: 20020098420 (2002-07-01), Eynon
patent: 20030095245 (2003-05-01), Mishiro et al.
Micro Lithography, Inc. web site. http://www.mliusa.com/products.htm#top.

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