Fusible link with built-in redundancy

Details Fusible link with built-in redundancy Fusible link with built-in redundancy

1989-02-03

1991-04-30

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437922, 148DIG55, H01L 21441, H01L 2144

Patent

active

050117912

ABSTRACT:
A fusible link is fabricated using sidewall spacer technology. The fusible link of the present requires low fusing power because a fusible link having a small cross-sectional area is obtainable. A conductive or semiconductive, fusible sidewall spacer is formed around a platform or in a well of a dielectric layer. Each fusible link may have two fusible portions per site, resulting in a built-in redundancy. Alternatively, the packing density of the fusible links may be increased by using each side of the fusible sidewall spacer as a fusible link. This process is compatible with bipolar and BICMOS processes used in fabricating high performance memory devices.

REFERENCES:
patent: 4358340 (1982-11-01), Fu
patent: 4542577 (1985-09-01), Jackson
patent: 4619037 (1986-10-01), Taguchi et al.

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