Fused silica pellicle in intimate contact with the surface...

Details Fused silica pellicle in intimate contact with the surface... Fused silica pellicle in intimate contact with the surface...

2008-04-01

2008-04-01

Rosasco, S. (Department: 1756)

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

C428S014000

Reexamination Certificate

active

07351503

ABSTRACT:
A fused silica pellicle for use on photomasks having increased durability and improved transmission uniformity and birefringence properties. The pellicle is to be intimately secured to the patterned surface of a photomask.

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U.S. Appl. No. 60/283,114, filed Apr. 11, 2001, Franklin D. Kalk.

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