Fused silica high pressure sensor

Details Fused silica high pressure sensor Fused silica high pressure sensor

1998-07-13

1999-11-02

Felber, Joseph L.

Measuring and testing

Fluid pressure gauge

Diaphragm

3612834, G01L 912

Patent

active

059748940

ABSTRACT:
A basic pressure sensor of four fused silica discs and two defined interior cavities. The discs are bonded to one another by a cold metal film metallization. The film metallization in spaced apart discs define capacitor electrodes where a central metallization film is a common electrode and the other metallization films define separate capacitor electrodes.
For a high pressure capacitance pressure sensor, end cap discs are relatively thick and are supported by an annular ring surface on interior discs which also have a small central cavity. Pressure acting on the discs develops compressive forces which change the volume of the central cavities and the capacitance as a function of pressure.
For low pressure capacitance pressure sensors, the end caps are relatively thin and flex to change a capacitance relationship defined by the bonding films. A reference capacitor can be incorporated by use of an additional electrode disc.

REFERENCES:
patent: 4924701 (1990-05-01), Delatorre
patent: 5357806 (1994-10-01), Dennis et al.

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