Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Passive components in ics
Reexamination Certificate
2008-01-29
2008-01-29
Gurley, Lynne (Department: 2811)
Active solid-state devices (e.g., transistors, solid-state diode
Integrated circuit structure with electrically isolated...
Passive components in ics
C257SE23149
Reexamination Certificate
active
11037166
ABSTRACT:
When the film thickness of an insulating film on a fuse connected to a circuit is not uniform within a wafer surface, there was a problem that disconnection of the fuse might become insufficient due to the insufficient intensity of a laser or disconnection of even an adjacent fuse due to excessive laser irradiation might occur. Further, a problem also occurred that after disconnection of the fuse, moisture entered from exterior through the region in which the fuse has been disconnected, so that the quality of a film underlying the fuse was adversely affected. After a SiON film, a SiN film, and a SiO2film have been formed to cover the fuse in this stated order, etching is performed to the SiN film, which is an etching stopper film. The SiON film having a uniform and desired film thickness is thereby formed on the fuse.
REFERENCES:
patent: 6100116 (2000-08-01), Lee et al.
patent: 6300232 (2001-10-01), Satoh
patent: 6518643 (2003-02-01), McDevitt et al.
patent: 6756620 (2004-06-01), Isenberger et al.
patent: 6835999 (2004-12-01), Omura et al.
K. Arndt et al., Reliability of Laser Activated Metal Fuses in DRAMS, 1999 IEEE/CPMT Int'l Electronics Manufacturing Technology Symposium, p. 389-394.
Arena Andrew O.
Gurley Lynne
NEC Electronics Corporation
Young & Thompson
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