Fuse of a semiconductor memory device and repair process for...

Semiconductor device manufacturing: process – Making device array and selectively interconnecting – Using structure alterable to nonconductive state

Reexamination Certificate

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Details

C438S215000, C438S601000, C257S209000, C257SE23149, C257SE23150

Reexamination Certificate

active

07977164

ABSTRACT:
Disclosed herein is a fuse of a semiconductor memory device and a repair process for the same. The fuse includes a lower conductive film of a multilayer interconnection formed on a lower structure of a semiconductor substrate, an upper conductive film of the multilayer interconnection spaced apart upward from the lower conductive film to define a predetermined vertical space therebetween, and a contact electrode, which vertically connects the upper and lower conductive films to each other and forms a fuse body. The lower conductive film includes a form not coinciding with that of the upper conductive film. With such a configuration, the device can achieve a stable minimization in the length of the fuse and the distance between adjacent fuses in consideration of a laser beam irradiation region for the high integration of the semiconductor memory device. In this way, the device performs the repair process of cutting the contact electrode and/or upper conductive film using a laser beam.

REFERENCES:
patent: 4162538 (1979-07-01), Thornburg
patent: 4198744 (1980-04-01), Nicolay
patent: 5903041 (1999-05-01), La Fleur et al.
patent: 6121073 (2000-09-01), Huang et al.
patent: 6225652 (2001-05-01), Devanney
patent: 6307213 (2001-10-01), Huang et al.
patent: 6713837 (2004-03-01), Mori et al.
patent: 7067897 (2006-06-01), Hatano et al.
patent: 2002/0100956 (2002-08-01), Brintzinger et al.
patent: 2003/0062590 (2003-04-01), Anthony
patent: 2003/0095451 (2003-05-01), Bang et al.
patent: 2003/0164532 (2003-09-01), Liu et al.
patent: 2004/0058256 (2004-03-01), Fujisawa et al.
patent: 2005/0167728 (2005-08-01), Kothandaraman et al.
patent: 2006/0138588 (2006-06-01), Hell

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