Heating – Work chamber having heating means
Patent
1976-10-26
1978-06-27
Camby, John J.
Heating
Work chamber having heating means
34 4, 219343, 219405, 432227, 432231, F24J 300
Patent
active
040972267
ABSTRACT:
A furnace for practising temperature gradient zone melting on one or more semiconductor bodies comprises a closable work chamber for receiving semiconductor bodies for processing, a radiant heat source which forms a first closure member and a heat sink which forms a second closure member, the closure members defining the work chamber and being mutually separable by, for example, a hydraulic actuator to allow access to the interior of the work chamber. A reflector is disposed between the heat source and heat sink in surrounding relationship to the semiconductor bodies being processed to ensure the maintenance of a uniform temperature gradient within the work chamber. The reflector and the heat sink are liquid cooled for the effective removal of heat therefrom. The heat sink is further provided with a plurality of radiation attenuating cavities to enhance the performance of the heat sink.
REFERENCES:
patent: 3445662 (1969-05-01), Langley
patent: 3554512 (1971-01-01), Elliott
patent: 3836751 (1974-09-01), Anderson
patent: 3858570 (1975-01-01), Beld et al.
patent: 4001047 (1977-01-01), Boah
Anthony Thomas R.
Cline Harvey E.
Erikson Carl A.
Fielding John O.
Camby John J.
Cohen J. T.
General Electric Company
Snyder M.
Winegar D. M.
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