Heating – Work feeding – agitating – discharging or conveying... – Removable furnace bottom section or kiln cart
Patent
1996-05-03
1998-06-23
Bennett, Henry A.
Heating
Work feeding, agitating, discharging or conveying...
Removable furnace bottom section or kiln cart
137171, 432 67, F27D 1700
Patent
active
057696284
ABSTRACT:
A furnace exhaust system with a regulator is disclosed. The furnace exhaust system comprises a furnace for providing a reaction chamber wherein a semiconductor process takes place, exhaust gas reacted from the semiconductor process being released through an exhaust pipe. An air pressure controller is connected to the furnace through the pipe for maintaining the pressure of the exhaust gas in the furnace and the pipe, the air pressure controller comprising a sensor for monitoring the pressure of the exhaust gas in the pipe, and a valve for controlling the passage of the exhaust gas according to the sensor. A regulator is connected to the pipe for providing an air block and an air buffer, the regulator comprising at least one cup-shaped structure with at least one hole in the bottom of the cup-shaped structure, the hole allowing condensed liquid from the furnace to be drained out.
REFERENCES:
patent: 4033269 (1977-07-01), Little et al.
patent: 4906182 (1990-03-01), Moller
patent: 5250092 (1993-10-01), Nakano
patent: 5407349 (1995-04-01), Hansotte, Jr. et al.
Bennett Henry A.
Vanguard International Semiconductor Corporation
Wilson Gregory A.
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