Optics: measuring and testing – Inspection of flaws or impurities
Reexamination Certificate
2005-09-27
2005-09-27
Pham, Hoa Q. (Department: 2877)
Optics: measuring and testing
Inspection of flaws or impurities
C356S369000
Reexamination Certificate
active
06950182
ABSTRACT:
Disclosed is the application of a functional equivalent to a spatial filter in ellipsometer and the like systems. Included are demonstrated multi-element converging lens systems which focus an electromagnetic beam onto a fiber optic. The purpose is to eliminate a radially outer annulus of a generally arbitrary intensity profile, so that electromagnetic beam intensity is caused to quickly decay to zero, rather than, for instance, demonstrate an irregular profile as a function of radius.
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“A New Calculus For The Treatment Of Optical Systems”, Jines, J.O.S.A., vol. 31, (Jul. 1941), is also indentified as it describes the characterizing of multiple lens elements which seperately demonstrate birefringence, as a single lens, (which can demonstrate reduced birefringence).
“In Situ Multi-Wavelength Ellipsometric Control of Thickness and Composition of Bragg Reflector Structures”, by Herzinger, Johs, Reich, Carpenter & Van Hove, Mat. Res. Soc. Symp. Proc., vol. 406, (1996) is also disclosed.
He Ping
Herzinger Craig M.
Johs Blaine D.
Liphardt Martin M
J. A. Woollam Co.
Pham Hoa Q.
Welch James D.
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