Stock material or miscellaneous articles – Structurally defined web or sheet – Including aperture
Reexamination Certificate
2011-08-23
2011-08-23
Watkins, III, William P (Department: 1783)
Stock material or miscellaneous articles
Structurally defined web or sheet
Including aperture
C428S336000, C428S539500, C428S428000, C428S432000, C428S433000, C156S272200
Reexamination Certificate
active
08003193
ABSTRACT:
The present invention provides a low-cost MEMS functional device by improving air tightness of a jointed section by anode junction in wafer level packaging for MEMS based functional devices. The MEMS functional device comprises a function element section formed by processing a substrate mainly made of Si, a metallized film for sealing formed around the functional element, and a glass substrate jointed to the metallized film for sealing by anode junction. Formed on a surface of the metallized film for sealing is a metallized film containing at least one of Sn and Ti as a main component.
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Ruby R.C., “Digest of Technical Papers 2002; IEEE International Solid-State Circuits conference 0-7803-7335-9/2002 IEEE pp. 184-185, Session No. 11.3”High-Q FBAR Filters in a Wafer-level Chip-Scale Package; (10 pages).
“Visuals Supplement 2002 to the Digest of Technical Papers;” IEEE International Solid-State Circuits conference 0-7803-7335-9/2002, vol. Forty-Five. (10 pages).
Hata Shohei
Matsushima Naoki
Sakamoto Eiji
Antonelli, Terry Stout & Kraus, LLP.
Hitachi , Ltd.
Watkins, III William P
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