Fully integrated magnetic micromotors and methods for their fabr

Details Fully integrated magnetic micromotors and methods for their fabr Fully integrated magnetic micromotors and methods for their fabr

1995-06-19

1998-01-20

Stephan, Steven L.

Electrical generator or motor structure

Dynamoelectric

Rotary

310 67R, 310 68R, H02K 700

Patent

active

057104662

ABSTRACT:
A planar fully integrated variable reluctance micromotor (10) is microfabricated on a substrate base (18). The micromotor includes a pin (19), rotor (12) with radially extending poles (16), and a stator (20) having a plurality of poles (21) configured in pairs (22) circumferentially spaced about the rotor. The rotor is microfabricated in place, or in situ, contiguous to the substrate base. The pairs of stator poles include a multilevel core (26) wrapped around a meander conductor (27) which is connected to bonding pads (32). The variable reluctance micromotor is particularly adapted to operating as a micropump (45) for conductive fluids.

REFERENCES:
patent: 4728835 (1988-03-01), Baines
patent: 4740410 (1988-04-01), Muller et al.
patent: 4755699 (1988-07-01), Schmider
patent: 4943750 (1990-07-01), Howe et al.
patent: 5013954 (1991-05-01), Shibaike et al.
patent: 5015906 (1991-05-01), Cho et al.
patent: 5043043 (1991-08-01), Howe et al.
patent: 5093594 (1992-03-01), Mehregany
patent: 5113100 (1992-05-01), Taghezout
patent: 5206983 (1993-05-01), Guckel et al.
patent: 5245193 (1993-09-01), Nakanishi
patent: 5252881 (1993-10-01), Muller et al.
patent: 5428259 (1995-06-01), Suzuki
Ahn et al., "A Planar Variable Reluctace Magnetic Micromotor With Fully Integrated Stator And Wrapped Coils", IEEE Catalog No. 93CH32665-6, Feb. 7-10, 1993, pp. 1-5.

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