Fully-integrated in-plane micro-photomultiplier

Details Fully-integrated in-plane micro-photomultiplier Fully-integrated in-plane micro-photomultiplier

2006-05-23

2006-05-23

Williams, Joseph (Department: 2879)

Electric lamp and discharge devices

Photosensitive

Photomultiplier

Reexamination Certificate

active

07049747

ABSTRACT:
An integrated micro-photomultiplier is disclosed which employs sub-micron-wide channels for electron amplification. These channels are created with standard lithographic and planar-fabrication techniques, and sealed with a vacuum-deposition process. A photocathode, continuous dynode, anode and signal-collector are fabricated along the channels. This photomultiplier design obviates the needs for through-substrate etching, and mechanical assembly of separate layers. Because large-scale-integration techniques can be used to fabricate multiple micro-photomultipliers, significant reductions in device cost and size are expected. The integrated micro-photomultiplier is useful for high-speed, low-light-level optical detection, and may find applications in optical communications, visible or infrared imaging, and chemical or biological sensing.

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patent: 6384519 (2002-05-01), Beetz et al.
“Silicon-Micromachined microchannel plates,” Beetz et al.Nuclear Instruments and Methods in Physics Research A 442.2000. p. 443-451, no month.

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