Data processing: measuring – calibrating – or testing – Measurement system – Performance or efficiency evaluation
Reexamination Certificate
2007-07-31
2007-07-31
Barlow, John (Department: 2863)
Data processing: measuring, calibrating, or testing
Measurement system
Performance or efficiency evaluation
Reexamination Certificate
active
11314627
ABSTRACT:
An inspection system for detecting anomalies on a substrate. A first network is coupled to the sensor array and communicates image data. Process nodes are couple to the first network, and process the data to produce reports. Each process node has an interface card that formats the data for a high speed interface bus that is coupled to the interface card. A computer receives and processes the data to produce the report. A second network receives the reports from the process nodes. A job manager is coupled to the second network, and receives the reports from the process nodes and sends information to the process nodes to coordinate the processing of the data in the process nodes.
REFERENCES:
patent: 2004/0179727 (2004-09-01), Takeuchi
CNN, TECHNOLOGY Apple launches faster Power Mac G5, Jun. 10, 2004.
Bhaskar Krishnamurthy
Bubna Kishore
Lin Jason Z.
Miller Lawrence R.
Rosengaus Eliezer
Barlow John
Khuu Cindy D.
KLA-Tencor Technologies Corporation
Luedeka Neely & Graham P.C.
LandOfFree
Full swath analysis does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Full swath analysis, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Full swath analysis will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3732209