Full-field optical measurements of surface properties of...

Details Full-field optical measurements of surface properties of... Full-field optical measurements of surface properties of...

2008-05-06

2008-05-06

Lee, Hwa (Andrew) (Department: 2886)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S514000, C356S520000

Reexamination Certificate

active

07369251

ABSTRACT:
Techniques and systems for using optical interferometers to obtain full-field optical measurements of surfaces, such as surfaces of flat panels, patterned surfaces of wafers and substrates. Applications of various shearing interferometers for measuring surfaces are described.

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