Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1987-08-11
1989-07-04
Karlsen, Ernest F.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324 73R, 357 52, G01R 3102, H01L 2934
Patent
active
048454257
ABSTRACT:
Contactless probing of an integrated circuit is carried out by flooding the surface of the integrated circuit with pulsed ultraviolet laser light, causing photoelectron emission as a function of the potentials at micropoints on the integrated circuit, converting this two-dimensional electron pattern into a corresponding relatively long duration pattern of luminescence by a luminescent target, and reviewing the result by video/computer scanning. Separate embodiments allow testing either in vacuum or in air, with or without insulating passivation layers present on the chip. The result is a contactless oscilloscope which monitors instantaneous voltages (logic states and AC switching waveforms) for a full two-demsnsional array of micropoints simultaneously. A chip with test points and appropriate windows for laser activation and luminescent targeting can be specially designed for optimal testing.
REFERENCES:
patent: 4296372 (1981-10-01), Feuerbaum
patent: 4431967 (1984-02-01), Nishioka
patent: 4464627 (1984-08-01), Munakata et al.
patent: 4609867 (1986-09-01), Schink
patent: 4642565 (1987-02-01), Jastrzebski et al.
Rubloff, G. W.; "Contactless Measurement . . . "; IBM Tech. Dis. Bull.; vol. 25; No. 3A; Aug. 1982; pp. 1171-1172.
Henley, F. J.; "An Automated . . . "; IEEE 1984 Int. Test Con.; 1984; pp. 536-542.
Baxter et al.; "A Photemission . . . ", Rev. Sci. Instrum.; vol. 44; No. 11; Nov. 1973; pp. 1628-1629.
Macari et al.; "Automated Contactless . . . "; 1982 IEEE/Proc. IRPS; Mar. 30, 31, 1982; pp. 163-166.
Beha Johannes G.
Dreyfus Russell W.
Kash Jeffrey A.
Rubloff Gary W.
Feig Philip J.
International Business Machines - Corporation
Karlsen Ernest F.
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