Front opening unified pod and associated method for...

Details Front opening unified pod and associated method for... Front opening unified pod and associated method for...

2005-01-18

2005-01-18

Spitzer, Robert H. (Department: 1724)

Gas separation: processes

Filtering

C015S312100, C015S316100, C015S347000, C015S415100, C055S385200, C055S467000

Reexamination Certificate

active

06843833

ABSTRACT:
A front opening unified pod for preventing the contamination of wafers due to outgassing. The front opening unified pod includes a front opening unified pod body and a cleaning apparatus. The front opening unified pod has an opening section and a base plate within the opening section and the base plate facing each other. The cleaning apparatus has at least an air-blasting element installed inside the front opening of the unified pod body. An air supplying system connected to the air-blasting element provides a stream of air.

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