Radiant energy – Invisible radiant energy responsive electric signalling – Ultraviolet light responsive means
Patent
1998-10-13
2000-09-05
Ham, Seungsook
Radiant energy
Invisible radiant energy responsive electric signalling
Ultraviolet light responsive means
2504831, G01J 142
Patent
active
061147044
ABSTRACT:
In one embodiment of the invention, phosphor powder in a binder is deposited on a flat first side of a fused silica substrate. The UV output of a laser beam is reflected off an angled beam splitter so as to be incident upon a flat second side of the fused silica substrate. The phosphor is energized by the UV light transmitted through the fused silica and re-radiates a visible wavelength. The binder is selected to be opaque to UV wavelengths so that only a thin layer (10-20 microns) of the phosphor is energized by the incident UV beam. Since the energized phosphor layer against the first side of the substrate is extremely thin and flat, the energized phosphor produces a visible light which precisely corresponds to the incident UV light. The visible light may then be used to determine the characteristics of the UV beam.
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Cymer Inc.
Ham Seungsook
Hanig Richard
Ogonowsky, Esq. Brian D.
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