Front face and edge inspection

Details Front face and edge inspection Front face and edge inspection

2007-05-21

2009-11-24

Chowdhury, Tarifur R. (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

Reexamination Certificate

active

07623228

ABSTRACT:
A surface and edge inspection system and the method for inspecting a substrate are disclosed. An edge inspection tool performs edge inspection of one or more substrates while a surface inspection tool performs surface inspection of a different substrate. A recipe for the surface inspection may be modified based on the results of the edge inspection.

REFERENCES:
patent: 5940175 (1999-08-01), Sun
patent: 2003/0169916 (2003-09-01), Hayashi et al.
patent: 2004/0105093 (2004-06-01), Hamamatsu et al.
patent: 2004/0207836 (2004-10-01), Chhibber et al.
patent: 2004/0234360 (2004-11-01), Hayashi
patent: 2005/0094136 (2005-05-01), Xu et al.

Affiliated with

Also associated with

Rating

Front face and edge inspection does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Front face and edge inspection, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Front face and edge inspection will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4124904