Fringe scanning shearing interferometer

Details Fringe scanning shearing interferometer Fringe scanning shearing interferometer

1985-04-18

1987-02-17

LaRoche, Eugene R.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356359, G01B 902, G01B 1100

Patent

active

046435760

ABSTRACT:
A fringe scanning shearing interferometer includes a converter lens for converting a wavefront reflected by an object under test illuminated with light into an approximately parallel wavefront, a beam splitter for dividing the approximately parallel wavefront into first and second wavefronts travelling in two directions, a pair of first and second prisms disposed respectively adjacent to the beam splitter in equally spaced relation thereto, a displacement mechanism for displacing the first prism in a direction normal to the direction in which the first wavefront falls on the first prism, a shearing device for slightly displacing the second prism in the same direction as that in which the second wavefront falls on the second prism, a photodetector, and a focusing lens for focusing the first and second wavefronts having passed respectively through the first and second prism, on the photodetector to produce interference fringes thereon.

REFERENCES:
patent: 3676006 (1972-07-01), Velzel
patent: 3767307 (1973-10-01), Bowker
patent: 4171159 (1979-10-01), White
patent: 4575248 (1986-03-01), Horwitz et al.

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