Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1996-06-27
1998-03-03
Turner, Samuel A.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356359, G01B 902
Patent
active
057241376
ABSTRACT:
An object fringe pattern is distinguished from other fringe patterns in an interferogram produced by an interferometer using a pair of diffraction gratings for separating and recombining test and reference beams. The object on which a test beam is grazingly incident is moved in X and Y directions in a plane perpendicular to an optical axis of the interferometer to change the brightness regions of the object fringe pattern. A computer identifies pixels whose irradiance changes in response to object movement, and then only irradiance data from the identified pixels is used in analyzing the interferogram to produce a measurement of a surface of the object.
REFERENCES:
"Improved Oblique-Incidence Interferometer", Hanharan, Optical Engineering, vol. 14, No. 3, May 1975, pp. 257-258.
"Oblique Incidence Interferometry Applied to Non-Optical Surfaces" by K. G. Birch, Journal of Physics E: Scientific Instruments, 1973, vol. 6, Great Britain, pp. 1045-1048.
"Grazing Incidence Interferometry Applied to the Measurement of Cylindrical Surfaces" by Thomas Dresel et al., Optical Engineering, Dec. 1995, vol. 34, No. 12, pp. 3531-3535.
Fleig Jon F.
Tronolone Mark J.
Tropel Corporation
Turner Samuel A.
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