Electricity: measuring and testing – Impedance – admittance or other quantities representative of... – Lumped type parameters
Patent
1989-03-16
1990-06-19
Eisenzopf, Reinhard J.
Electricity: measuring and testing
Impedance, admittance or other quantities representative of...
Lumped type parameters
324662, G01R 2726
Patent
active
049357000
ABSTRACT:
A fringe field, capacitive distance sensor for measuring the distance between a probe and the surface of the conductive body. The sensor comprises a conductive plate element mounted by the probe, the thickness of the plate element being substantially less than the height and width of the plate element. The plate element is positioned adjacent to and normal to the body surface, and the fringe field capacitance between the plate element and the body is measured, to thereby determine the distance between the probe and the body surface. The probe may be in contact with and scanned across the body surface, to provide surface profile measurements. A probe including a plurality of plate elements may be positioned inside an opening such as a hole, to measure the geometry of the hole. By maintaining the hole probe adjacent one electrode in contact with the hole wall, both profile and geometry measurements may be made. A noncontacting probe including one or more plate elements may be used to measure surface topography.
REFERENCES:
patent: 3771051 (1973-11-01), Abbe
patent: 3805150 (1974-04-01), Abbe
patent: 3842194 (1974-10-01), Clemens
patent: 3984767 (1976-10-01), Denton et al.
patent: 4103226 (1978-07-01), Fromson et al.
patent: 4152641 (1979-05-01), Hughes et al.
patent: 4190797 (1980-02-01), Lecklider et al.
patent: 4295092 (1981-10-01), Okamura
patent: 4296371 (1981-10-01), Keizer et al.
patent: 4422035 (1983-12-01), Risko
Matey et al., Scanning Capacitance Microscope, 3-1985, J. Appl. Phys., 57(5), pp. 1437-1444.
Advertising Brochure for "The Capacitance Hole Probe Inspection System", by GETEX Division, a Division of Lockheed Corporation, Jan. 2, 1986.
Lee, S. Y.; "Variable Capacitance Signal Transduction and the Comparison with Other Transduction Schemes"; Fundamentals of Aerospace Instrumentation, vol. 3; May 1970.
Albrecht Laurence J.
Garbini Joseph L.
Jorgensen Jens E.
Mauer Georg F.
Eisenzopf Reinhard J.
Harvey Jack B.
Washington Research Foundation
LandOfFree
Fringe field capacitive sensor for measuring the size of an open does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Fringe field capacitive sensor for measuring the size of an open, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Fringe field capacitive sensor for measuring the size of an open will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2262463