Frequency uniformity of film bulk acoustic resonators

Details Frequency uniformity of film bulk acoustic resonators Frequency uniformity of film bulk acoustic resonators

2005-09-27

2005-09-27

Talbot, Brian K. (Department: 1762)

Coating processes

Electrical product produced

C427S240000, C427S282000, C427S402000, C427S421100

Reexamination Certificate

active

06949268

ABSTRACT:
The frequency uniformity of a film bulk acoustic resonator may be improved by controlling the thickness across a wafer of one or more layers of the film bulk acoustic resonator. One or more layers of the film bulk acoustic resonator may be deposited in a way that irregularities in the deposition process from one die to another may be controlled.

REFERENCES:
patent: 6051907 (2000-04-01), Ylilammi
patent: 6419803 (2002-07-01), Baldwin et al.
patent: 6456173 (2002-09-01), Ella et al.

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