Frequency tunable resonant scanner and method of making

Details Frequency tunable resonant scanner and method of making Frequency tunable resonant scanner and method of making

2007-11-29

2010-06-15

Le, Que T (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

C359S199200

Reissue Patent

active

RE041374

ABSTRACT:
A MEMs scanning device has a variable resonant frequency. In one embodiment, the MEMs device includes a torsion arm that supports an oscillatory body. In one embodiment, an array of removable masses are placed on an exposed portion of the oscillatory body and selectively removed to establish the resonant frequency. The material can be removed by laser ablation, etching, or other processing approaches. In another approach, a migratory material is placed on the torsion arm and selectively stimulated to migrate into the torsion arm, thereby changing the mechanical properties of the torsion arm. The changed mechanical properties in turn changes the resonant frequency of the torsion arm. In another approach, symmetrically distributed masses are removed or added in response to a measured resonant frequency to tune the resonant frequency to a desired resonant frequency. A display apparatus includes the scanning device and the scanning device scans about two or more axes, typically in a raster pattern. Various approaches to controlling the frequency responses of the scanning device are described, including active control of MEMs scanners and passive frequency tuning.

REFERENCES:
patent: 4421381 (1983-12-01), Ueda et al.
patent: 5097354 (1992-03-01), Goto
patent: 5144184 (1992-09-01), Greiff
patent: 5165279 (1992-11-01), Norling et al.
patent: 5225923 (1993-07-01), Montagu
patent: 5247384 (1993-09-01), Inoue et al.
patent: 5355181 (1994-10-01), Ashizaki et al.
patent: 5444565 (1995-08-01), Goto
patent: 5451425 (1995-09-01), Vig
patent: 5467104 (1995-11-01), Furness et al.
patent: 5488862 (1996-02-01), Neukermans et al.
patent: 5557444 (1996-09-01), Melville et al.
patent: 5629790 (1997-05-01), Neukermans et al.
patent: 5629794 (1997-05-01), Magel et al.
patent: 5640133 (1997-06-01), MacDonald et al.
patent: 5645735 (1997-07-01), Bennin et al.
patent: 5648618 (1997-07-01), Neukermans et al.
patent: 5673139 (1997-09-01), Johnson
patent: 5767666 (1998-06-01), Asada et al.
patent: 5914801 (1999-06-01), Dhuler et al.
patent: 5969465 (1999-10-01), Neukermans et al.
patent: 5995264 (1999-11-01), Melville
patent: 6016686 (2000-01-01), Thundat
patent: 6044705 (2000-04-01), Neukermans et al.
patent: 6052197 (2000-04-01), Drake
patent: 6245590 (2001-06-01), Wine et al.
patent: 2175705 (1986-12-01), None
Syms, R.R.A., et al. “Focused Ion Beam Tuning of In-Plane.Vibrating Micromechanical Resonators”, Electronics Letters, IEE Stevanage, GB, vol. 35, No. 15, Jul. 22, 1999. pp. 1277-1278.

Affiliated with

Also associated with

Rating

Frequency tunable resonant scanner and method of making does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Frequency tunable resonant scanner and method of making, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Frequency tunable resonant scanner and method of making will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4167250