Metal working – Piezoelectric device making
Patent
1982-07-26
1984-04-17
Hall, Carl E.
Metal working
Piezoelectric device making
219121LM, 310312, H01L 4122
Patent
active
044425740
ABSTRACT:
Surface acoustic wave devices with precisely set frequencies are produced by laser trimming metallization strips on the device while monitoring the device frequency and/or phase shift. The trimming strips may be metallizations added during device manufacture or after device manufacture, or they may include selected ones of the reflecting gratings.
REFERENCES:
patent: 3766616 (1973-10-01), Standte
patent: 4131484 (1978-12-01), Carnso et al.
Haydl, W. H. et al., "Fine Tuning of Surface-Acoustic-Wave Resonator Filters with Metallisation Thickness," Electronics Letters, Jun. 12, 1975, vol. 11, No. 12, pp. 252-253.
James, S., et al., "Fine Tuning of S.A.W. Resonators Using Argon Ion Bombardment," Electronics Letters, Oct. 11, 1979, vol. 15, No. 21, pp. 683-684.
Rosenfeld, R. C., et al., "Tuning Quartz SAW Resonators by Opening Shorted Reflectors," 1977 Proceedings of the Thirty-First Annual Frequency Control Symposium, pp. 231-239.
"MIRT Series 800 Mask Inspection and Repair Tool," Advertising Flyer, Quantronix Corporation, Smithtown, New York.
Kong Wendell M. T.
Stearns Cleo M.
Wanuga Stephen
Baker Carl W.
General Electric Company
Hall Carl E.
Lang Richard V.
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