Frequency transform phase shifting interferometry

Details Frequency transform phase shifting interferometry Frequency transform phase shifting interferometry

2005-04-19

2005-04-19

Hannaher, Constantine (Department: 2878)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S513000, C356S514000, C356S515000, C356S519000

Reexamination Certificate

active

06882432

ABSTRACT:
The invention features methods and systems in which wavelength-tune PSI data is analyzed in the frequency domain to produce spectrally separated frequency peaks each corresponding to a particular pair of surfaces in an interferometric cavity defined by multiple pairs of surfaces. Each frequency peak provides optical path length information about a corresponding pair of surfaces in the cavity. As a result, the interferometric data from such cavities provides simultaneous information about multiple surfaces.

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