Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2006-06-06
2006-06-06
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
C356S484000, C356S485000, C356S497000, C356S504000, C356S511000, C356S513000
Reexamination Certificate
active
07057742
ABSTRACT:
A frequency-scanning interferometer is modified to include a diffuse reference surface. An illuminating system produces an expanding measuring beam, portions of which reflect from a test object surface and the diffuse reference surface on converging paths to an imaging system. Interference patterns between overlapping images of the object and reference surfaces are generated at a plurality of frequencies for measuring the object surface with respect to the reference surface.
REFERENCES:
patent: 4725144 (1988-02-01), Nelson et al.
patent: 4832489 (1989-05-01), Wyant et al.
patent: 5319668 (1994-06-01), Luecke
patent: 5467184 (1995-11-01), Tenjimbayashi
patent: 5546187 (1996-08-01), Pepper et al.
patent: 5627363 (1997-05-01), Paxman et al.
patent: 5666195 (1997-09-01), Schultz et al.
patent: 5777742 (1998-07-01), Marron
patent: 5802085 (1998-09-01), Lefevre et al.
patent: 5867512 (1999-02-01), Sacher
patent: 5880841 (1999-03-01), Marron et al.
patent: 5907404 (1999-05-01), Marron et al.
patent: 5909282 (1999-06-01), Kulawiec
patent: 5926277 (1999-07-01), Marron et al.
patent: 6015969 (2000-01-01), Nathel et al.
patent: 6018535 (2000-01-01), Maeda
patent: 6026100 (2000-02-01), Maeda
patent: 6195168 (2001-02-01), De Lega et al.
patent: 6359692 (2002-03-01), Groot
patent: 6424407 (2002-07-01), Kinrot et al.
patent: 6656528 (2003-12-01), Ouellet et al.
patent: 2002/0109851 (2002-08-01), Deck
“Multiple-wavelength Interferometry With Tunable Source”, R.G. Pilston and G.N. Steinberg, Applied Optics, vol. 8, No. 3, Mar. 1969, pp. 552-556.
“Two-wavelength Interferometry”, D. Malacara, editor,Optical Shop Testing, New York, Wiley, 1978, pp. 397-402.
“Multiple-wavelength Phase-shifting Interferometry”, Y. Cheng and J,C. Wyant, Applied Optics, vol. 24, No. 6, Mar. 15, 1985, pp. 804-806.
“Distance measurement by the wavelength shift of laser diode light”, H. Kikuta, K. Iwata, and R. Nagata, Applied Optics, vol. 25, No. 17, Sep. 1, 1986, pp. 2976-2980.
“Interferometer for measuring displacement and distance”, T. Kubota, M. Nara, and T. Yoshino, Optics Letters, vol. 12, No. 5, May 1987, pp. 310-312.
“Three-color laser-diode interferometer”, P. de Groot, Applied Optics, vol. 30, No. 25, Sep. 1, 1991, pp. 3612-3616.
“Wavelength-shift Interferometry for distance measurements using the Fourier transform technique for fringe analysis”, M. Suematsu and M. Takeda, Applied Optics, vol. 30, No. 28, Oct. 1, 1991, pp. 4046-4055.
“Three-dimensional lensless imaging using laser frequency diversity”, J.C. Marron and K.S. Schroeder, Applied Optics, vol. 31, No. 2, Jan. 10, 1992, pp. 255-262.
“Holographic laser radar”, J.C. Marron and K.S. Schroeder, Optics Letters, vol. 18, No. 5, Mar. 1, 1993, pp. 385-387.
“Use of a opacity constraint in three-dimensional imaging”, R. G. Paxman, J.H. Seldin, J.R. Fienup, and J.C, Marron, in proceedings of the SPIE Coference on Inverse Optics III, Orlando, Florida, Apr. 1994.
“Applications of Tunable Lasers to Laser Radar and 3D Imaging”, L.G. Shirley and G.R. Hallerman, Technical Report 1025, Lincoln Laboratory, MIT, Lexington, Massachusetts, Feb. 26, 1996.
“Wavelength scanning profilometry for real-time surface shape measurement”, S. Kuwamura and I. Yamaguchi, Applied Optics. vol. 36, No. 19, Jul. 1, 1997, pp. 4473-4482.
“Three-dimensional imaging using a tunable laser source”, J.C. Marron and K.W. Gleichman, Optical Engineering 39(1) 47-51, Jan. 2000, pp. 47-51.
“Spectrally narrow pulsed dye laser without beam expander”, M.G. Littman and H.J. Metcalf, Applied Optics. vol. 17, No. 14, Jul. 15, 1978, pp. 2224-2227.
“A simple extended-cavity diode laser”, A.S. Arnold, J.S. Wilson, and M.G. Boshier, Review of Scientific Instruments, vol. 69, No. 3, Mar. 1998, pp. 1236-1239.
“External-cavity diode laser using a grazing-incidence diffraction grating”, K.C. Harvey and C.J. Myatt, Optics Letters, vol. 16, No. 12, Jun. 15, 1991, pp. 910-912.
“Novel geometry for single-mode scanning of tunable lasers”, K Liu and M.G. Littman, Optics Letters, vol. 6, No. 3, Mar. 1981, pp. 117-118.
“External-cavity Frequency-stabilization of visible and infrared semiconductor lasers for high resolution spectroscopy”, M.G. Boshier, D. Berkeland, E.A. Hinds, and V. Sandoghar, Optics Communications 85, Sep. 15, 1991, pp. 355-359.
“Widely Tunable External Cavity Diode Lasers”, T. Day, M. Brownell, and I-Fan Wu, New Focus, Inc., 1275 Reamwood Avenue, Sunnydale, California.
“Littrow configuration tunable external cavity diode laser with fixed direction output beam”, C.J. Hawthorn, K.P. Weber and R.E. Scholten, Review of Scientific Instruments, vol. 72, No. 12, Dec. 2001, pp. 4477-4479.
“Fizeau Interferometer”, D. Malarcara, editor,Optical Shop Testing, New York, Wiley, 1978, pp. 19-24.
“Burch's Interferometer Employing Two Matched Scatter Plates”, D. Malarcara, editor,Optical Shop Testing, New York, Wiley, 1978, pp. 82-84.
“Holographic contouring by using tunable lasers”, N. George and W. Li, Optics Letters, vol. 19, No. 22, Nov. 15, 1994, pp. 1879-1881.
“Use of a multimode short-external-cavity laser diode for absolute-distance intererometry”, P. de Groot, Applied Optics, vol. 32, No. 22, Aug. 1, 1993, pp. 4193-4198.
“Three-dimensional sensing of rough surfaces by coherence radar”, T. Dresel, G, Hausler, and H. Venzke, Applied Optics, vol. 31, No. 7, Mar. 1, 1992, pp. 919-925.
Littrow-Laser Web site sacher.de/littrow.htm, Apr. 7, 2002.
“Tunable Diode Lasers—Stand up to Research and Commercial Applications”, B. Shine, Laser Product Line Manager, New Focus, Inc., originally published in Photonics Spectra, Jan. 1992, pp. 102.
“Scatter Fringes of Equal Thickness”, J.M. Burch, Nature, vol. 17, May 16, 1953, pp. 889-890.
“Scatter-Fringe Interferometry”, J.M. Burch, J. Opt. Soc. Am. 52, 1962, pp. 600.
“Some Further Aspects of Scatter-Fringe Interferometry”, A.H. Shoemaker and M.V.R.K. Murty, Applied Optics, vol. 5, No. 4, Apr. 1966, pp. 603-607.
“Laser Speckle and Related Phenomena”, J.C. Dainty, editor, Springer-Verlag, Berlin, 1984.
“Digital Picture Processing”, A. Rosenfeld, and A.C. Kak, vol. 1,. Academic Press. New York. 1982.
U.S. Appl. No. 10/446,012 entitled Tunable Laser System Having “An Adjustable External Cavity”.
U.S. Appl. No. 10/465,181 entitled “Common-path Frequency-scanning Interferometer”.
U.S. Appl. No. 10/601,802 entitled “Multi-stage Data Processing For Frequency-scanning Interferometer”.
U.S. Appl. No. 10/610,236 entitled “Interferometer System of Compact Configuration”.
Faklis Dean
Marron Joseph C.
Brown Khaled
Harter Secrest & Emery LLP
Lightgage, Inc.
Ryan Thomas B.
Shaw Esq. Brian B.
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