Frequency measuring device, polishing device using the same...

Details Frequency measuring device, polishing device using the same... Frequency measuring device, polishing device using the same...

2006-05-16

2006-05-16

Patidar, Jay (Department: 2862)

Electricity: measuring and testing

Magnetic

With means to create magnetic field to test material

C324S226000, C324S076390, C438S017000

Reexamination Certificate

active

07046001

ABSTRACT:
A frequency measuring device capable of accurately detecting an end point of polishing a semiconductor wafer by obtaining a frequency measurement result highly accurately in a short period of time. A device FC, which measures the frequency of a measured signal comprises a counting section including a plurality of n-nary counters, a time reference circuit which outputs a time reference signal for every predetermined time interval, and a plurality of gate circuits whose outputs are connected to the inputs of the n-nary counters. The gate circuits receive the measured signal at a first input and receive the time reference signal at the predetermined time intervals at a second input. With this structure, the counting section supplies the frequency measured result of the measured signal every predetermined time interval.

REFERENCES:
patent: 3909714 (1975-09-01), Nakano
patent: 5017869 (1991-05-01), Oliver
patent: 5559428 (1996-09-01), Li et al.
patent: 5644221 (1997-07-01), Li et al.
patent: 5659492 (1997-08-01), Li et al.
patent: 5660672 (1997-08-01), Li et al.
patent: 5663637 (1997-09-01), Li et al.
patent: 5770948 (1998-06-01), Li et al.
patent: 5876265 (1999-03-01), Kojima
patent: 6433541 (2002-08-01), Lehman et al.
patent: 6563308 (2003-05-01), Nagano et al.
patent: 2002/0055192 (2002-05-01), Redeker et al.
patent: 60000369 (1985-01-01), None
patent: 60000 369 (1985-01-01), None
patent: 901938 (1982-01-01), None
patent: WO 01/46684 (2001-06-01), None
Horowitz, “The Art of Electronics”, 1980, Cambridge University Press, p. 618.

Affiliated with

Also associated with

Rating

Frequency measuring device, polishing device using the same... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Frequency measuring device, polishing device using the same..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Frequency measuring device, polishing device using the same... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3647545