Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Patent
1990-04-11
1991-07-30
Nguyen, Nam X.
Coating apparatus
Gas or vapor deposition
Crucible or evaporator structure
118718, 118724, C23C 1600
Patent
active
050352024
ABSTRACT:
Piezo-electric oscillators are widely used in reference clocks for various apparatus. Prior to use, the oscillation frequency of the piezo-electric oscillators is generally finely adjusted. For this purpose, a frequency fine-adjusting apparatus includes a laser beam generator for emitting a laser beam having a wavelength of 2 .mu.m or less, a target material having a metallic layer, a set of rollers for feeding the target material in the condition in which the metallic layer confronts the main electrode of the piezo-electric oscillator and is spaced a predetermined length from the main electrode, and an optical system for applying the laser beam to the metallic layer. When the laser beam is applied to the metallic layer, part of the metallic layer is vaporized and adheres to the surface of the main electrode, thereby finely adjusting an oscillation frequency of the piezo-electric oscillator.
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Nishikawa Yukio
Uesugi Yuji
Matsushita Electric - Industrial Co., Ltd.
Nguyen Nam X.
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