Frequency and temperature compensation synthesis for a MEMS...

Details Frequency and temperature compensation synthesis for a MEMS... Frequency and temperature compensation synthesis for a MEMS...

2006-05-03

2008-11-11

Kinkead, Arnold (Department: 2817)

Oscillators

Electromechanical resonator

C331S016000, C331S175000, C331S176000

Reexamination Certificate

active

07449968

ABSTRACT:
Disclosed herein is a signal generation technique based on a reference frequency provided by a MEMS resonator. The signal generation technique compensates for temperature- and fabrication process-induced frequency variations collectively. In some embodiments, a device implementing the disclosed signal generation technique includes a fractional-N synthesizer, a temperature sensor, calibration data, and a sigma-delta modulator to adjust the reference frequency of the MEMS resonator to a desired frequency value while compensating for the temperature variation of the MEMS resonator.

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Wang et al., “VHF Free-Free Beam High-Q Micromechanical Resonators,”Technical Digest, 12thInt'l IEEE Micro Electro Mechanical Systems Conf., pp. 453-458 (1999).

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