Frequency adjustment of piezoelectric resonator utilizing low en

Details Frequency adjustment of piezoelectric resonator utilizing low en Frequency adjustment of piezoelectric resonator utilizing low en

1979-03-16

1980-11-04

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

29 2535, 29593, 204164, 427100, H01L 4122

Patent

active

042322391

ABSTRACT:
A monolithic crystal filter formed by a multi-section piezoelectric resonator having anodizable electrodes is subjected to plasma from a low energy oxygen glow device to adjust the frequency response. The electrodes are selectively connected to potentials whereby the electrodes are individually anodized to increase the density thereof and change the frequency response of the resonator. The glow device includes anode and cathode rings separated by an insulator ring which holds a cathode screen across the cathode. The anode ring has a concave face and the inside diameter is generally the same as the diameter of the resonator so that the resonator can be placed close to the anode and plasma is localized on the resonator electrodes. The electrodes are connected in a frequency measuring circuit so that the response is monitored and the extent of anodization of the individual electrodes is controlled.

REFERENCES:
patent: 4130771 (1978-12-01), Bottom

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