Frequency adjustment method of surface acoustic wave device,...

Wave transmission lines and networks – Coupling networks – Electromechanical filter

Reexamination Certificate

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C333S193000

Reexamination Certificate

active

11142472

ABSTRACT:
A method for adjusting frequency of a surface acoustic wave device includes performing a frequency adjustment. The surface acoustic wave device includes a substrate including at least one of a lithium tantalate substrate, a lithium niobate substrate, and a lithium tetraborate substrate. The surface acoustic wave device further includes an IDT electrode formed on the substrate that excites a pseudo-longitudinal leaky surface acoustic wave. The performing includes frequency adjustment by adjusting a thickness of the substrate at a side opposite in a thickness direction to a side on which the IDT electrode is formed.

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De Zhang et al.; “Study of Propagation Properties of Quasi-longitudinal Leaky Surface Acoustic Wave Propagating on Y-Rotated Cut Quartz Substrates”; IEEE Ultrasonics Symposium, 1999; pp. 321-324.
Ivan D. Avramov; “High Performance GHz Range Surface Transverse Wave Resonant Devices, Application to Low-Noise Microwave Oscillators and Communication Systems”; International Meeting on Future Trends of Acoustic Wave Devices, 1996; pp. 132-139.
Yook-Kong Yong et al.; “Analysis of High Velocity Pseudo-Surface Acoustic Waves (HVPSAW) in Quartz Periodic Structures with Electrode Fingers”; IEEE/EIA International Frequency Control Symposium and Exhibition; 2000; pp. 301-306.

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