Free-standing rotational rod-fed source

Details Free-standing rotational rod-fed source Free-standing rotational rod-fed source

1997-06-23

1999-05-18

Hoang, Tu Ba

Industrial electric heating furnaces

Electron beam furnace device

Vaporizing furnace

373 14, 21912111, H01J37/305

Patent

active

059057530

ABSTRACT:
In a rotational rod-fed electron-beam evaporation source used with sublimating rod material, the ingot rod can be free-standing with respect to the crucible. This means that the side of the ingot rod near the tip of the rod does not contact a cooling crucible. In this way, the system can be operated in a defocused position of the electron beam, and the sweep of the electron beam can go over the edge of the ingot rod tip. Using these features, a substantially radial sweep of the tip of an ingot rod that sweeps over the edge can produce a substantially flat evaporation pattern on the ingot rod, producing a good utilization of the expensive ingot rod material.

REFERENCES:
patent: 3377419 (1968-04-01), Schiller et al.
patent: 3454814 (1969-07-01), Mancebo
patent: 3730962 (1973-05-01), Norwald
patent: 4027093 (1977-05-01), Kibbish
patent: 4130416 (1978-12-01), Zaboronok et al.
patent: 4613306 (1986-09-01), Bauer et al.
Physical Vapor Deposition; Hill, Russell J., ed.; Temescal; 1976.

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