Coherent light generators – Particular active media – Semiconductor
Patent
1993-07-30
1995-01-17
Epps, Georgia Y.
Coherent light generators
Particular active media
Semiconductor
437129, 372 96, H01S 319
Patent
active
053832124
ABSTRACT:
Conventional microfabrication techniques in conjunction with the precise growth of layers of single crystalline materials by epitaxial growth techniques allow the creation of electro-optic microstructures which achieve high reflectivity with only few periods of layer pairs. Standard lithographic techniques are utilized to fabricate quantum wells which are confined on both sides by air, acrylic resin, or vacuum. The quantum wells are fabricated from spatially and compositionally modulated III-V superlattices in which alternate layers of the structures are sacrificed by selective etching. The structures are patterned such that the quantum wells are suspended between support posts.
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Knox Wayne H.
Shunk Stephen C.
Williams Michael D.
Zucker Jane E.
AT&T Corp.
Epps Georgia Y.
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