Frame transfer prober

Details Frame transfer prober Frame transfer prober

2006-10-24

2006-10-24

Allen, Stephone B. (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

With circuit for evaluating a web, strand, strip, or sheet

C250S221000, C250S559120, C250S559130, C250S559370, C250S559450

Reexamination Certificate

active

07126145

ABSTRACT:
A frame transfer prober1, for carrying out an electrical property test on a number of semiconductor chips10fixed on a dicing tape11, comprises a separation detection unit9for detecting the separation and/or protrusion of the semiconductor chips10from the dicing tape. The separation detection unit has a light emitting portion91for emitting a laser beam L, a light receiving portion92for receiving the laser beam L so emitted and a determination portion93for determining the separation and/or protrusion of the semiconductor chips through an increase or decrease in amount of the laser beam L so received.

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