Radiant energy – Photocells; circuits and apparatus – Housings
Patent
1996-06-28
1998-03-03
Le, Que
Radiant energy
Photocells; circuits and apparatus
Housings
4283177, H01J 502
Patent
active
057238600
ABSTRACT:
Proposed is an improvement in a frame-supported pellicle, which is a device for dust-proof protection of a photomask used in the photolithographic patterning works in the manufacture of fine electronic devices, consisting of a rigid pellicle frame, a highly transparent membrane of a plastic resin spread over and adhesively bonded to one end surface of the pellicle frame in a slack-free fashion and a layer of a pressure-sensitive adhesive formed on the other end surface of the pellicle frame to facilitate mounting of the frame-supported pellicle on the surface of a photomask and to secure the same at the correct position. The improvement comprises forming the layer of the pressure-sensitive adhesive on the end surface of the pellicle frame to have an outwardly convex surface, for example, in the form of a barrel vault instead of the flat surface in the prior art so that the troubles in the prior art due to occurrence of air gaps between the surface of the adhesive layer and the surface of the photomask unavoidable in mounting of the conventional frame-supported pellicle can be prevented to ensure completely air-tight sealing thereby. The adverse influence on the pellicle membrane due to the air-tightness of sealing by the pressure difference between the outer and inner surfaces can be overcome by providing a penetrating opening for air escape in the pellicle frame covered with a filter sheet.
REFERENCES:
patent: 4470508 (1984-09-01), Yen
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Patent Abstracts of Japan vol. 17, No. 543, 29 Sep. 1995 & JP-A-05 150446 (Matsushita Electron Corp.) 18 Jun. 1993.
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Hamada Yuichi
Kashida Meguru
Le Que
Shin-Etsu Chemical Co. , Ltd.
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