Fourier domain low-coherence interferometry for light...

Details Fourier domain low-coherence interferometry for light... Fourier domain low-coherence interferometry for light...

2006-09-05

2006-09-05

Lee, Hwa (Andrew) (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07102758

ABSTRACT:
An apparatus and method for obtaining depth-resolved spectra for the purpose of determining the size of scatterers by measuring their elastic scattering properties. Depth resolution is achieved by using a white light source in a Michelson interferometer and dispersing a mixed signal and reference fields. The measured spectrum is Fourier transformed to obtain an axial spatial cross-correlation between the signal and reference fields with near 1 μm depth-resolution. The spectral dependence of scattering by the sample is determined by windowing the spectrum to measure the scattering amplitude as a function of wavenumber.

REFERENCES:
patent: 5565986 (1996-10-01), Knuttel
patent: 6002480 (1999-12-01), Izatt et al.
patent: 6501551 (2002-12-01), Tearney et al.
patent: 6853457 (2005-02-01), Bjarklev et al.

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