Optics: measuring and testing – By light interference – For dimensional measurement
Reissue Patent
2011-06-28
2011-06-28
Lee, Hwa S. A (Department: 2886)
Optics: measuring and testing
By light interference
For dimensional measurement
Reissue Patent
active
RE042497
ABSTRACT:
An apparatus and method for obtaining depth-resolved spectra for the purpose of determining the size of scatterers by measuring their elastic scattering properties. Depth resolution is achieved by using a white light source in a Michelson interferometer and dispersing a mixed signal and reference fields. The measured spectrum is Fourier transformed to obtain an axial spatial cross-correlation between the signal and reference fields with near 1 μm depth-resolution. The spectral dependence of scattering by the sample is determined by windowing the spectrum to measure the scattering amplitude as a function of wavenumber.
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A Lee Hwa S.
Duke University
Withrow & Terranova , PLLC
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