Four-terminal methods for resistivity measurement of...

Details Four-terminal methods for resistivity measurement of... Four-terminal methods for resistivity measurement of...

2006-04-18

2006-04-18

Tang, Minh N. (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S763010, C324S765010

Reexamination Certificate

active

07030633

ABSTRACT:
This invention provides an innovative multi-line structure and an effective four-terminal method for the resistivity measurement of semiconductor materials. The multi-line structure and the four-terminal method not only allow one to perform resistivity measurement on any inorganic and organic semiconductor thin film conveniently, rapidly and accurately but also offer the means to study resistivity uniformity across the semiconductor thin film.

REFERENCES:
patent: 4516071 (1985-05-01), Buehler
patent: 5552718 (1996-09-01), Bruce et al.
patent: 6118137 (2000-09-01), Fulford et al.
patent: 6836140 (2004-12-01), Fujikawa et al.

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