Four-quadrant, multiprobe-edge sensor for semiconductor wafer pr

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

324158F, 324 725, G01R 3102, G01R 3122

Patent

active

042197716

ABSTRACT:
A four-quadrant multiprobe edge sensor system which comprises a printed circuit board having a plurality of data probes mounted thereon which include four data-detector probes particularly-positioned. The data-detector probes include a support body, and an arm supported by the body and attached thereto in an angular fashion. A probe tip in the form of a needle extends from and is attached to the arm. The probe tip includes a downwardly positioned point for contact with the surface having integrated circuits defined thereon. A force sensitive material is attached to but electrically isolated from the arm and has conductor leads extending therefrom with said force sensitive material comprising a piezoelectric material, for example. The four data-detector probes are located on the printed circuit board such that when being used for testing, the probe tips of the four data-detector probes are placed in each of the four corners of an integrated circuit chip defined on a semiconductor slice. The four-quadrant edge sensor detects the edge of the semiconductor slice regardless of the direction the slice is moving in relation to the probe head. This detection is signaled to a detection circuit which sends a signal to the multiprobe to begin indexing and reversing direction of the slice movement for testing the next chip.

REFERENCES:
patent: 2558563 (1951-06-01), Janssen
patent: 2782636 (1957-02-01), Peucker
patent: 3093710 (1963-06-01), Eyck
patent: 3446065 (1969-05-01), Wiesler et al.
patent: 3810017 (1974-05-01), Wiesler et al.
patent: 3849728 (1974-11-01), Evans
Byrnes et al., "Self-Measurement of Probe Deflection . . . ", IBM Tech. Dis. Bull., vol. 20, No. 1, Jun. 1977, pp. 166-167.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Four-quadrant, multiprobe-edge sensor for semiconductor wafer pr does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Four-quadrant, multiprobe-edge sensor for semiconductor wafer pr, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Four-quadrant, multiprobe-edge sensor for semiconductor wafer pr will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-1307397

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.