FOUP door transfer system

Details FOUP door transfer system FOUP door transfer system

2007-07-17

2007-07-17

Fox, Charles A. (Department: 3652)

Material or article handling

Device for emptying portable receptacle

Nongravity type

C414S757000, C414S935000, C294S106000

Reexamination Certificate

active

10734723

ABSTRACT:
A device (12) picks up at least one semi-conductor wafer (11) from a container (14) of wafers fitted on one side (15) of an aperture (13) in the transfer station (10) of a semi-conductor wafer processing plant. The device is on the opposite side (17) of the aperture and the pick-up is effected through it. The device incorporates a shutter (1) movable between open and closed positions. A wafer picking up means (2) is attached to the shutter and is designed to enter partially within the container below a wafer and seize the wafer by its edge. A pick up moving means (3) moves the picking up means (2) back and forth through the aperture (13).

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