Fishing – trapping – and vermin destroying
Patent
1985-10-02
1988-01-12
Roy, Upendra
Fishing, trapping, and vermin destroying
156612, 427 531, 437 21, 437 84, H01L 21265, C30B 3300
Patent
active
047191830
ABSTRACT:
A process for the production of semiconductor devices comprising: (1) forming a first oxide film on a semiconductor substrate, (2) forming a groove or grooves on the first oxide film, (3) forming a first polycrystalline silicon film as an active layer on the whole surface of the first oxide film, (4) forming a second oxide film on the first polycrystalline silicon film, (5) forming a second polycrystalline silicon film on the second oxide film, said second polycrystalline silicon film serving as a buffer layer which absorbs the fluctuation of a scanning laser beam irradiating the first polycrystalline silicon film in step (7), (6) forming an anti-reflection film made of an oxide film on said buffer layer, and (7) irradiating the first polycrystalline silicon film with a scanning laser beam having a dual peak type power distribution to melt said first polycrystalline silicon film in such a manner that both peaks in the power distribution of the laser beam are positioned at both outer sides of said grooves, respectively, thereby achieving a single crystallization of said first polycrystalline silicon film serving as an active layer within each of said grooves in which said semiconductor devices are to be formed.
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Roy Upendra
Sharp Kabushiki Kaisha
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