Metal treatment – Compositions – Heat treating
Patent
1978-05-23
1980-12-23
Rutledge, L. Dewayne
Metal treatment
Compositions
Heat treating
148187, 219121L, 357 13, 357 20, 357 91, H01L 21263, H01L 2126
Patent
active
042408431
ABSTRACT:
The specification describes structures, and methods for making them, in which self-guarded p-n junctions or the electrical isolation between multiple devices in an integrated circuit are formed using regions of amorphous semiconductor. The structures are conveniently formed by ion damaging the semiconductor to form the amorphous region and annealing selected portions of the amorphous region by selective radiation annealing.
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Celler George K.
Miller Gabriel L.
Bell Telephone Laboratories Incorporated
Roy Upendra
Rutledge L. Dewayne
Western Electric Company Inc.
Wilde Peter V. D.
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