Forming refill for monolithic inkjet printhead

Details Forming refill for monolithic inkjet printhead Forming refill for monolithic inkjet printhead

1997-08-08

2000-02-01

Gulakowski, Randy

Etching a substrate: processes

Forming or treating thermal ink jet article

438 21, B41J 2135

Patent

active

060199075

ABSTRACT:
A refill channel for multiple rows of nozzles is formed in a silicon die by thinning the die in the vicinity of the rows, then etching respective trenches within the thinned portion of the die. Monolithic architectures including such trenches are achieved for existing inkjet nozzle geometries having close row spacing.

REFERENCES:
patent: 4455192 (1984-06-01), Tamai
patent: 5159353 (1992-10-01), Fasen et al.
patent: 5160577 (1992-11-01), Deshpande
patent: 5194877 (1993-03-01), Lam et al.
patent: 5305015 (1994-04-01), Schantz et al.
patent: 5308442 (1994-05-01), Taub et al.
patent: 5469201 (1995-11-01), Erickson et al.

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