Forming ferroelectric polymer memories

Semiconductor device manufacturing: process – Having magnetic or ferroelectric component

Reexamination Certificate

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Details

C438S240000, C438S238000, C438S250000, C438S393000, C257SE27104

Reexamination Certificate

active

07727777

ABSTRACT:
In accordance with some embodiments, a ferroelectric polymer memory may be formed of a plurality of stacked layers. Each layer may be separated from the ensuing layer by a polyimide layer. The polyimide layer may provide reduced layer-to-layer coupling, and may improve planarization after the lower layer fabrication.

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