Forming aspheric optics by controlled deposition

Details Forming aspheric optics by controlled deposition Forming aspheric optics by controlled deposition

1995-10-13

1998-04-28

Dzierzynski, Paul M.

Optical: systems and elements

Having significant infrared or ultraviolet property

Multilayer filter or multilayer reflector

359350, 359355, 359360, 359584, 359589, 359868, G02B 508, G02B 110, G02B 510

Patent

active

057452865

ABSTRACT:
An aspheric optical element formed by depositing material onto a spherical surface of an optical element by controlled deposition to form an aspheric surface of desired shape. A reflecting surface, single or multi-layer, can then be formed on the aspheric surface by evaporative or sputtering techniques. Aspheric optical elements are suitable for deep ultra-violet (UV) and x-ray wavelengths. The reflecting surface may, for example, be a thin (.about.100 nm) layer of aluminum, or in some cases the deposited modifying layer may function as the reflecting surface. For certain applications, multi-layer reflective surfaces may be utilized, such as chromium-carbon or tungsten-carbon multi-layer, with the number of layers and thickness being determined by the intended application.

REFERENCES:
patent: 4738516 (1988-04-01), Verhoeven et al.
patent: 5003567 (1991-03-01), Hawryluk et al.
patent: 5400182 (1995-03-01), Chiba
patent: 5433988 (1995-07-01), Fukuda et al.

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