Formation of tin oxide films on glass substrates

Details Formation of tin oxide films on glass substrates Formation of tin oxide films on glass substrates

1994-11-22

1996-01-30

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Running length work

118719, 118729, C23C 1600

Patent

active

054877849

ABSTRACT:
Apparatus and method for forming a metal oxide film on a glass substrate in which ambient air and particularly water vapor is prevented from reaching the initial nucleation site by injection of dry gas at a point such that ambient air is excluded from the area around the upstream edge of the injector where the film first starts to be formed. Crystal growth inhibiting gas is injected so as to reach only the initial nucleation site to improve the nucleation process, thereby improving film properties without decreasing the overall film thickness. Application of the above methods in the deposition of tin oxide yields improved haze control of the tin oxide film, including very low haze coatings.

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