Electricity: electrical systems and devices – Electrostatic capacitors – Fixed capacitor
Reexamination Certificate
2007-11-27
2007-11-27
Ha, Nguyen T (Department: 2831)
Electricity: electrical systems and devices
Electrostatic capacitors
Fixed capacitor
C361S303000, C361S304000, C361S309000, C361S312000, C361S330000, C257S295000, C257S296000
Reexamination Certificate
active
10709907
ABSTRACT:
Disclosed is a method of fabricating a metal-insulator-metal (MIM) capacitor. In this method, a dielectric layer is formed above a lower conductor layer and an upper conductor layer is formed above the dielectric layer. The invention then forms an etch stop layer above the upper conductor layer and the dielectric layer, and forms a hardmask (silicon oxide hardmask, a silicon nitride hardmask, etc.) over the etch stop layer. Next, a photoresist is patterned above the hardmask, which allows the hardmask, the etch stop layer, the dielectric layer, and the lower conductor layer to be etched through the photoresist.
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Coolbaugh Douglas D.
Eshun Ebenezer E.
Feilchenfeld Natalie B.
Gautsch Michael L.
He Zhong-Xiang
Canale Anthony J.
Gibb & Rahman, LLC
Ha Nguyen T
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