Optical waveguides – Integrated optical circuit
Reexamination Certificate
2007-10-09
2007-10-09
Pak, Sung (Department: 2874)
Optical waveguides
Integrated optical circuit
C385S131000, C438S033000, C438S462000
Reexamination Certificate
active
11362952
ABSTRACT:
Cleaved grooves, also referred to herein as “cleave streets”, are formed exclusively in a wafer passivation layer overlaying a wafer to provide for correctly aligned and sharp cleaves prior to singulation of the wafer into separate die or chips. The deployment of cleave streets is applicable to both Group III–V-base wafers, such as InP-based wafers with photonic integrated circuits (PICs), and silicon-based wafers with integrated circuits where such wafers utilize a passivating layer
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Joyner Charles H.
Kish, Jr. Fred A.
Missey Mark J.
Nagarajan Radhakrishnan L.
Carothers, Jr. W. Douglas
Infinera Corporation
Pak Sung
Petkovsek Daniel
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